| 000 | 00454nam a2200169 a 4500 | ||
|---|---|---|---|
| 005 | 20260717093214.0 | ||
| 008 | 260717s1998 ii 000 0 eng d | ||
| 020 | _a8181479858 | ||
| 041 | _aeng | ||
| 082 | 0 | 4 | _a621.55 |
| 100 | 1 | _aHoffman, Dorothy M. | |
| 245 | 1 | 0 |
_aHandbook of vacuum science and technology / _cHoffman, Dorothy M. |
| 250 | _a1st ed. | ||
| 264 | 1 |
_aNew Delhi : _bAcademic Press, _cc1998,2005. |
|
| 300 | _axxii, 835 p. | ||
| 942 | _cBK | ||
| 999 |
_c53526 _d53526 |
||