00654nam a2200193 a 450000500170000000800410001702000180005804100080007608200130008410000430009724500930014026400420023330000330027550000400030865000490034865000250039765000110042270000270043320260717091002.0260717s1974    ii            000 0 eng d  a9780471406280  aeng04a541.04241 aHollahan, John R. (John Ronald), 1936-10aTechniques and applications of plasma chemistry.cHollahan, John R. (John Ronald), 1936- 1aLondon :bJohn Wiley and sons,c1974.  aviii, 403 p. : ill. ; 23 cm.  a"A Wiley-Interscience publication." 4aPlasma chemistry -- Industrial applications. 4aChemistry, Physical. 4aGases.1 aBell, Alexis T., 1942-